Actuator, optical fiber moving apparatus, and optical switch

ABSTRACT

A moving body ( 10 ) is composed of a main body ( 11 ), piezoelectric elements ( 13 ), ( 13′ ) secured to the sides of the main body in the traveling direction thereof, and coils ( 12 ), ( 12′ ) secured to the piezoelectric elements ( 13 ), ( 13′ ). A magnet is disposed on a guide rail and the coils ( 12 ), ( 12′ ) are energized, and whereby the moving body ( 10 ) can be moved a long distance at high velocity by a magnetic type linear motor system. Further, the coils ( 12 ), ( 12′ ) are energized, the main body ( 11 ) is pressed against the guide rail on which the magnet is mounted by the magnetic force that is generated by the energization of the coils ( 12 ), ( 12′ ) and the piezoelectric elements ( 13 ), ( 13′ ) are extended and contracted by a voltage applied thereto, thereby the moving body ( 10 ) is impact driven. With this operation, the moving body can be micro driven at a pinpoint accuracy. With above arrangement, there can be provided an actuator that can make both a high velocity movement of a large stroke and a micro movement of a pinpoint accuracy.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to an actuator, an optical fibermoving apparatus driven by the actuator and an optical switch driven bythe actuator, and more particularly, to an actuator having a roughmoving means using a linear moter mechanism and a micro moving meansusing a thrust force obtained by converting electric energy into kineticenergy.

[0003] 2. Description of the Related Art

[0004] Conventionally, there are known an actuator for executinginchworm operation and an actuator driven by impact drive by using, forexample, a piezoelectric element, as actuators for obtaining a thrustforce by converting electric energy into kinetic energy.

[0005] The operation principle of the inchworm operation will bedescribed here with reference to FIG. 18. An inchworm mechanism, whichis composed of bodies 41 and 42 and piezoelectric elements 43-1 to 43-3extendable in two-axes directions, is placed on a slide surface 44 (FIG.18(a)). First, the piezoelectric element 43-1 extends in an upwarddirection orthogonal to a traveling direction by the voltage appliedthereto, thereby the body 41 is lifted upward (FIG. 18(b)). Next, thepiezoelectric element 43-2 extends in the traveling direction by thevoltage applied thereto (FIG. 18(c)). After the piezoelectric element43-2 extends to its full length, only the voltage applied to thepiezoelectric element 43-1, which has extended upward, is shut off, andthe body 42, which has been lifted upward, returns onto the slidesurface 44 (FIG.18(d)).

[0006] Next, the piezoelectric element 43-3 is extended in the upwarddirection orthogonal to the traveling direction by the voltage appliedthereto, and the body 41 is lifted upward thereby (FIG. 18(e)). Thevoltage applied to the piezoelectric element 43-2, which has extended inthe traveling direction, is shut off, and the piezoelectric element 43-2returns to its original length (FIG. 18(f)). Finally, the voltageapplied to the piezoelectric element 43-3 is shut off, and the body 41,which has been lifted upward, returns onto the slide surface 44 (FIG.18(g)). As a result, the bodies 41 and 42 moves forward in the travelingdirection by the amount of expansion of the piezoelectric element 43-2.

[0007] The bodies 41 and 42 can be moved in an opposite direction byapplying a voltage to the piezoelectric elements 43-1 and 43-2 in areverse sequence.

[0008] Further, there is an impact drive mechanism acting as a microactuator mechanism, in addition to the above inchworm mechanism. Theoperation principle of the impact drive mechanism will be also describedwith reference to FIG. 19. The impact drive mechanism is arranged suchthat a body 51 is joined to a body 52 through a piezoelectric element53. The body 51 is pressed against a slide surface 54 by the pressureforce F applied thereto (FIG. 19(a)). When the piezoelectric element 53is extended as shown in the figure by the voltage abruptly appliedthereto, the body 51 begins to slide left on the slide surface 54because the inertial force of the body 51 overcomes the friction betweenthe body 51 and the slide surface 54. At the same time, the body 52 alsomoves right on the slide surface (FIG. 19(b)). Next, when the voltageapplied to the piezoelectric element 53 is slowly released, thepiezoelectric element 53 slowly returns to its original length. At thistime, almost no inertial force is caused to both the bodies 51 and 52because they have a small acceleration. Accordingly, the movement of thebody 51 is prevented by the frictional force generated by the pressureforce F between the body 51 and the slide surface 54. As a result, theamount of movement of the impact drive mechanism, which was made whenthe piezoelectric element 53 extended at the beginning, is maintained,and the overall shape thereof returns to its original shape (FIG.19(c)). The repetition of this operation permits the impact drivemechanism to move in the direction of the body 51.

[0009] The impact drive mechanism can be moved in an opposite directionby slowly extending the piezoelectric element 53 at the beginning andthen by abruptly contracting it when it extends to its full length.

[0010] The actuator disclosed in Japanese Unexamined Patent Publication(KOKAI) No. 4-360025 is known as an actuator using the above inchwormmechanism, and the actuator disclosed in Japanese Unexamined PatentPublication (KOKAI) No. 8-266073 is known as a conventional technologyusing the above impact drive mechanism.

[0011] A first problem of conventional actuators resides in that theycannot move a large distance at high velocity. This is because that onlyan inchworm mechanism and an impact drive mechanism are mounted thereonand these mechanisms are driven making use of the micro displacement ofa piezoelectric element. That is, this type of the conventionalactuators are arranged as an actuator specialized in micro drive andcannot move a large distance at high velocity.

[0012] A second problem of the conventional actuators resides in thatthey cannot be formed in a small size. This is because that when aconventional actuator is composed of only the micro actuators such asthe inchworm mechanism and the impact drive mechanism, it is impossibleto move it a long distance at high velocity. To cope with this problem,it is necessary to separately provide a high velocity drive mechanismsuch as a voice coil motor on the high velocity drive mechanism. As aresult, the overall size of the conventional actuator is increased.

[0013] Therefore, when a mechanical type optical switch is composed ofan optical fiber moving body using a conventional actuator, switchingcannot be carried out at high velocity or a compact optical switchcannot be realized.

SUMMARY OF THE INVENTION

[0014] Accordingly, it is a first object of the present invention forsolving the problems of the conventional technology to provide a smallactuator capable of moving at high velocity and making positionalalignment at a pinpoint accuracy. A second object of the presentinvention is to provide an optical fiber moving body capable of movingat high velocity and making positional alignment at a pinpoint accuracy.A third object of the present invention is to provide a compact opticalswitch capable of being switched at high velocity and having a lessconnection loss.

[0015] To achieve the above-noted objects, the present invention adoptsthe following basic technical constitution.

[0016] The first aspect of the present invention is an actuator formoving a movable body by using a thrust force obtained by convertingelectric energy into kinetic energy, comprising: a first means formoving the movable body at high velocity for rough positioning of themovable body; and a second means for moving the movable body at lowvelocity for accurate positioning of the movable body.

[0017] In the second aspect of the present invention, the first means isa moving section of a linear motor having a moving section and astationary section.

[0018] In the third aspect of the present invention, the moving sectionof the linear motor comprises any of a coil, a permanent magnet, and aconductive body, and the stationary section of the linear motorcomprising any of a permanent magnet and a coil.

[0019] In the fourth aspect of the present invention, the second meanscomprises a piezoelectric element.

[0020] In the fifth aspect of the present invention, the second means iscontrolled by impact drive or inchworm drive using a piezoelectricelement.

[0021] The sixth aspect of the present invention is an actuator forcontrolling positioning of a movable body, comprising: a main body ofthe movable body; a pair of piezoelectric elements secured to the mainbody; a pair of coils secured to the pair of piezoelectric elements; aguide for guiding the main body; and a plurality of magnets disposedalong the guide.

[0022] In the seventh aspect of the present invention, the main bodycomprises a position detecting means for detecting a position thereof.

[0023] The eighth aspect of the present invention is an actuator forcontrolling positioning of a movable body, comprising: a main body ofthe movable body; a piezoelectric element secured to the main body; acoil secured to the piezoelectric element; a guide for guiding the mainbody; and a plurality of magnets disposed along the guide.

[0024] The ninth aspect of the present invention is an optical switchcomprising: a board having a first and second main surfaces; a firstmovable body to which a first optical fiber is secured; a firstpiezoelectric element secured to the first movable body; a first coilsecured to the first piezoelectric element; a first guide, formed on thefirst surface, for guiding the first movable body; a plurality ofpermanent magnets disposed along the first guide; a second movable bodyto which a first optical fiber is secured; a second piezoelectricelement secured to the second movable body; a second coil secured to thesecond piezoelectric element; a second guide, formed on the secondsurface and provided orthogonally to the first guide, for guiding thesecond movable body; a plurality of permanent magnets disposed along thesecond guide; and a through hole formed at an intersection of the firstguide and second guide provided on the board.

BRIEF DESCRIPTION OF THE DRAWINGS

[0025]FIG. 1(a) and FIG. 1(b) are a plan view and a side elevationalview of an actuator of a first embodiment of the present invention,respectively;

[0026]FIG. 1(c) is a block diagram of the first embodiment of thepresent invention.

[0027]FIG. 2 is a plan view of the actuator of the first embodiment ofthe present invention mounted on guides;

[0028] FIGS. 3(a) to (c) are views explaining operations of the actuatorof the first embodiment of the present invention;

[0029] FIGS. 4(a) to (c) are views explaining operations of the actuatorof the first embodiment of the present invention;

[0030] FIGS. 5(a) to (d) are views explaining other operations of theactuator of the first embodiment of the present invention;

[0031]FIG. 6(a) and FIG. 6(b) are a plan view and a side elevationalview of an actuator of a second embodiment of the present invention,respectively;

[0032]FIG. 7 is a side elevational view of an actuator of a thirdembodiment of the present invention;

[0033]FIG. 8 is a side elevational view of an actuator of a fourthembodiment of the present invention;

[0034]FIG. 9(a) is a plan view of an actuator of a fifth embodiment ofthe present invention;

[0035]FIG. 9(b) is a side elevational view of the actuator;

[0036]FIG. 10 is a plan view of the actuator of the fifth embodiment ofthe present invention mounted on guides;

[0037]FIG. 11(a) and FIG. 11(b) are a plan view and a side elevationalview of an actuator of a sixth embodiment of the present invention,respectively;

[0038]FIG. 12 is a plan view of the actuator of the sixth embodiment ofthe present invention mounted on guides;

[0039]FIG. 13 is a perspective view showing a mechanical type opticalswitch of an example of the present invention;

[0040]FIG. 14(a) is a partial enlarged view of the mechanical typeoptical switch shown in FIG. 13;

[0041]FIG. 14(b) is a sectional view of a slider;

[0042]FIG. 15 is a schematic plan view of the mechanical type opticalswitch of the example of the present invention;

[0043]FIG. 16 is a view explaining an operation of the mechanical typeoptical switch of the example of the present invention;

[0044]FIG. 17(a) and FIG. 17(b) are drawings explaining the operation ofthe mechanical type optical switch of the example of the presentinvention;

[0045]FIG. 18(a) to FIG. 18(g) are drawings explaining the operationprinciple of an inchworm drive system; and

[0046]FIG. 19(a) to FIG. 18(c) are drawings explaining the operationprinciple of an impact drive system.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0047] Next, embodiments of the present invention will be describedbelow in detail with reference to the drawings.

[0048] (First Embodiment)

[0049]FIG. 1(a) and FIG. 1(b) are a plan view and a side elevationalview of an actuator of a first embodiment of the present invention,respectively. As shown in FIG. 1(a) and FIG. 1(b), the actuator of thefirst embodiment is composed of a moving body 10 in which piezoelectricelements 13 and 13′ and coils 12 and 12′ are joined to both the sides ofthe moving member 10. Further, as shown in FIG. 2, the moving body 10 isinserted between guides 14 and can move along the guides 14. Further, apermanent magnet 15 is disposed along one of the guides 14 so thatS-poles and N-poles alternately appear along the guide 14.

[0050] Next, an operation of the actuator of the first embodiment willbe described. First, the high velocity operation (rough operation) ofthe actuator will be described with reference to FIG. 3. As shown inFIG. 3, the high velocity operation of the actuator is carried out by aprinciple similar to that of a so-called magnetic type linear motor. Thecoils 12 and 12′, which are joined to the main body 11 through thepiezoelectric elements 13 and 13′, are energized, and magnetic fieldsare generated in the coils 12 and 12′ such that the coils 12 and 12′near to an S-pole permanent magnet 15 and an N-pole permanent magnet 15are set to an N-pole and an S-pole, respectively. An attractive force Ais generated by the magnetic fields generated in the coils 12 and 12′between the coils and the permanent magnet 15 disposed along the guide14. When the moving body 10 is moved by the attractive force A one blockof the permanent magnet 15, the coils 12 and 12′ are energized atopposite polarity, thereby a new attractive force A′ is generated.Attractive forces A, A′, and A″ are generated by switching theenergization of the coils 12 and 12′, thereby a thrust force for movingthe moving body 10 at high velocity can be obtained.

[0051] Next, the micro operation of the actuator will be described withreference to FIG. 4. The micro operation of the actuator of the firstembodiment shown in FIG. 4 is carried out by a principle similar to thatof so-called impact drive. The coils 12 and 12′, which are joined to themain body 11 through the piezoelectric elements 13 and 13′, areenergized, and magnetic fields are generated in the coils 12 and 12′such that the coils 12 and 12′ near to an S-pole permanent magnet 15 andan N-pole permanent magnet 15 are set to an S-pole and an N-pole,respectively. Attractive forces A and A′ are generated by the magneticfields generated in the coils 12 and 12′ between the coils and thepermanent magnets 15 disposed along the guide 14, respectively. Apressure force F for pressing the main body 11 against the guide 14 canbe obtained by the attractive forces A and A′. When a voltage isabruptly applied to the piezoelectric element 13 in this state, thepiezoelectric element 13 extends. Thus, the pressure force F causes theinertial force of the main body 11 to overcome the frictional forcegenerated between the main body 11 and the guide 14, and the main body11 begins to move in a right direction on the slide surface. At the sametime, the coil 12 also moves in a left direction left on the slidesurface.

[0052] Next, when the voltage applied to the piezoelectric element 13 isslowly released, the piezoelectric element 13 slowly returns to itsoriginal length. At this time, almost no inertial force is generated toboth the main body 11 and the coil 12 because they have a smallacceleration. Accordingly, the movement of the main body 11 is preventedby the frictional force generated between the main body 11 and the guide14 by the pressure force F.

[0053] As a result, the amount of movement of the actuator, which isgenerated when the piezoelectric element 53 extended at the beginning,is maintained, and the overall shape of the actuator returns to itsoriginal shape. The main body 11 can be moved in the direction of thecoil 12′ by repeating this operation.

[0054] The actuator can be moved in an opposite direction by previouslyextending the piezoelectric element 13 slowly and then contracting itabruptly. Further, an operation similar to that described above can becarried out by using the piezoelectric element 13′ disposed on theopposite side.

[0055] As described above, in the actuator of the first embodiment,magnetic type linear motor drive and impact drive can be realized by thesingle moving body, whereby there can be provided an actuator having thecharacteristics of both high velocity movement and positional alignmentof a pinpoint accuracy. Further, a miniature actuator can be realizedbecause the coils, which are used for the magnetic type linear motordrive, are integrated with the inertial body necessary to the impactdrive as well as the magnetic force generated by the coils is used toobtain the pressure force necessary for the impact drive.

[0056] (Other Drive Method of the Actuator of the First Embodiment)

[0057] The method for micro driving the actuator of the first embodimentby the impact drive was described above. However, the actuator of thefirst embodiment can be also driven by an inchworm system. The inchwormdrive system will be described with reference to FIG. 5. The coil 12 isenergized and a magnetic field is generated in the coil 12 such that theportion thereof facing the N-pole permanent magnet 15 is set to anS-pole. An attractive force A is generated between the coil 12 and theN-pole permanent magnet 15 disposed along the guide 14 by the magneticfield generated in the coil 12. Further, the coil 12′ disposed on theopposite side is energized and a magnetic field is generated in the coil12′ such that the portion thereof facing the S-pole permanent magnet 15is set to an S-pole. A repulsive force R is generated by the magneticfield generated in the coil 12 between the coil 12′ and the permanentmagnet 15 disposed along the guide 14. In this state, a voltage isapplied to the piezoelectric elements 13′ and 13 so as to extend them.At this time, the main body 11 and the coil 12′ are moved in the rightdirection on the slide surface by the amounts of extension of thepiezoelectric elements 13 and 13′ while the coil 12 held by theattractive force A remains stationary. Next, the coil 12 is energized onthe contrary, and a magnetic force is generated thereby in the coil 12so as to generate a repulsive force R between the coil 12 and thepermanent magnet 15. Further, the coil 12′ disposed on the opposite sideis energized, and a magnetic field is generated in the coil 12′ so as togenerate an attractive force A between the coil 12′ and the permanentmagnet 15. In this state, the voltage applied to the piezoelectricelements 13′ and 13 is released, and they are contracted to theiroriginal length. At this time, the main body 11 and the coil 12 aremoved in the right direction on the sheet surface by the amounts ofcontraction of the piezoelectric elements 13 and 13′ while the coil 12′held by the attractive force A remains stationary. As a result, themoving body can be moved by the amounts of extension of the twopiezoelectric elements.

[0058] Note that, in the inchworm drive of the first embodiment, thecoils may be simply deenergized so as to remove the magnetic fieldgenerated therein in place of generating the repulsive force by thecoils.

[0059]FIG. 1(c) is a block diagram of the first embodiment of thepresent invention. In FIG. 1(c), the numeral 100 denotes a driving meansfor controlling the movable body 10 by impact drive or inchworm driveusing the piezoelectric element 13 or/and 13′.

[0060] (Second Embodiment)

[0061] FIGS. 6(a) and 6(b) are a plan view and a side elevational viewof an actuator of a second embodiment of the present invention. In theactuator of the second embodiment, a coil 12 and a piezoelectric element13 are disposed on only one side of a main body 11 as shown in FIG. 6,while the coils and the piezoelectric elements are disposed on both theside of the main body 11 in the first embodiment.

[0062] The actuator of the second embodiment is driven at high velocitysimilarly to the fist embodiment. That is, an attractive force isgenerated between a permanent magnet disposed along a guide and a coil12 by sequentially inverting the polarity of a current flowing in thecoil 12, thereby a thrust force is obtained. When the actuator is micromoved, first, a current is supplied to the coil 12 to generate anattractive force between the coil 12 and the permanent magnet, and thepiezoelectric element 13 is extended in this state, similarly to theinchworm drive. With this operation, the main body 11 is moved. Next,the current having been supplied to the coil 12 is shut off, and thevoltage having been applied to the piezoelectric element 13 is slowlyreduced, similarly to the impact drive system. At this time, the mainbody 11 remains stationary because a frictional force acts between thecoil 12 and the guide, and only the coil 12 is moved toward the mainbody 11. The main body 11 can be moved in a direction opposite to thecoil 12 by repeating this operation.

[0063] To move the main body 11 in an opposite direction, the sequenceof the above operation is reversed so that the piezoelectric element 13is slowly extended without supplying a current to the coil 12 and thevoltage having been applied to the piezoelectric element 13 is releasedwhile restricting the movement of the coil 12 by supplying a currentthereto.

[0064] (Third Embodiment)

[0065]FIG. 7 is a side elevational view of an actuator of a thirdembodiment of the present invention. In the first and second embodimentsof the present invention, the coil(s) and the piezoelectric element(s)are disposed to the outside of the main body 11. In a moving body 10 ofthe third embodiment, however, two coils 12 and 12′ are disposed in theinside of a main body 11 and connected to the wall surfaces of the mainbody 11 through piezoelectric elements 13 and 13′, respectively, asshown in FIG. 7.

[0066] The actuator of the third embodiment is driven at high velocity,similarly to the fist embodiment. That is, a thrust force is obtained bygenerating an attractive force between a permanent magnet disposed alonga guide and the coil 12 by sequentially inverting the polarity of acurrent flowing in the coil 12. Further, when the actuator is micromoved in a right direction on the slide surface, first, thepiezoelectric element 13 is extended in a state that the attractiveforce is applied to the coil 12. Next, the current supplied to the coil12 is shut off, and an attractive force is applied to the coil 12′.Then, the voltage having been applied to the piezoelectric element 13 isreleased in this state. After the current having been supplied to thecoil 12′ is shut off, the above-mentioned operations are repeated.Further, when the moving body 10 is moved in a left direction on theslide surface, the operations of the coils 12 and 12′ and thepiezoelectric elements 13 and 13′ are inverted from the above operationsthereof.

[0067] (Fourth Embodiment)

[0068]FIG. 8 is a side elevational view showing an actuator of a fourthembodiment of the present invention. In the third embodiment of thepresent invention, the two coils and the two piezoelectric elements aredisposed in the inside of the main body 11. In the fourth embodiment,however, a single coil 12 is disposed in the inside of a main body 11,and both the ends of the coil 12 are connected to the wall surfaces ofthe main body 11 through piezoelectric elements 13 and 13′, as shown inFIG. 8.

[0069] The actuator of the fourth embodiment is driven at high velocity,similarly to the fist embodiment. That is, a thrust force is obtained bygenerating an attractive force between a permanent magnet disposed alonga guide and the coil 12 by sequentially inverting the polarity of acurrent flowing in the coil 12. When the actuator is micro moved in aright direction on the slide surface, a current is supplied to the coil12 so as to generate an attractive force between the coil 12 and thepermanent magnet, and the piezoelectric element 13′ is extended in thisstate, similarly to the inchworm drive. With this operation, the mainbody 11 is moved in the right direction. Next, the current supplied tothe coil 12 is shut off, and the piezoelectric element 13 is extendedand the piezoelectric element 13′ is returned to its original length atthe same time. Then, a current is supplied to the coil 12 so as togenerate an attractive force between the coil 12′ and the permanentmagnet, and the piezoelectric element 13′ is extended again and thepiezoelectric element 13 is returned to its original length in thisstate. Thereafter, the above-noted operations are performed repeatedly.

[0070] (Fifth Embodiment)

[0071] FIGS. 9(a) and 9(b) are a plan view and a side elevational viewof an actuator of a fifth embodiment of the present invention. While theactuators of the first to fourth embodiments of the present inventiondisposes the coil(s) on the moving body, in the fifth embodiment, apermanent magnet is joined to a moving body. That is, as shown in FIGS.9(a) and (b), a moving body 10 is arranged such that permanent magnets16 and 16′ are connected to the right and left sides of a main body 11through piezoelectric elements 13 and 13′. Then, as shown in FIG. 10,the moving body 10 of the fifth embodiment is disposed between guides14. Additionally, coils 17 which constitute a linear motor together withpermanent magnets 16 and 16′ are disposed along one of the guides 14.

[0072] In this fifth embodiment, the permanent magnet of the firstembodiment is replaced with the coils thereof, and the operation of thefifth embodiment is the same as that of the first embodiment. Thus, thedescription of operation of the fifth embodiment is omitted.

[0073] While the fifth embodiment is arranged by replacing the coils ofthe first embodiment with the permanent magnets thereof, the permanentmagnet of the second to fourth embodiments may be mounted on the movingbody side by applying the same replacement thereto.

[0074] (Sixth Embodiment)

[0075] FIGS. 11(a) and 11(b) are a plan view and a side elevational viewof an actuator of a sixth embodiment of the present invention. While theactuators of the first to fifth embodiments described above are moved athigh velocity by the magnetic type linear motor, the actuator of thesixth embodiment is moved at high velocity by an induction type linearmotor. Accordingly, in the sixth embodiment, electric conductors 18 and18′ are connected to the front and back side surfaces of a main body 11through piezoelectric elements 13 and 13′, as shown in FIG. 11. Theelectric conductors 18 and 18′ carry out a function as an inertial bodywhen a moving body 10 of the sixth embodiment is driven by an impactdrive system. Then, as shown in FIG. 12, the moving body 10 of the sixthembodiment is disposed between guides 14, and a coil 19 is disposedalong the outside of one of the guides 14 to generate a moving magneticfield in the guides 14.

[0076] Next, an operation of the actuator of the sixth embodiment willbe described. When the actuator is moved at high velocity, a movingmagnetic field, which moves in a direction where the moving body 10 ismoved, is generated by the coils 19. With this operation, the electricconductor 18 is subjected to a thrust force and moved at high velocityin the direction where the magnetic field moves. Further, when themoving body 10 is micro moved in a right direction on the slide surface,first, the piezoelectric element 13 is extended abruptly. Then, thepiezoelectric element 13 is slowly contracted as well as thepiezoelectric element 13′ is extended slowly. At this time, the mainbody 11 remains stationary due to the frictional force between the mainbody 11 and the guides 14. Next, the piezoelectric element 13 isextended abruptly as well as the piezoelectric element 13′ is contractedabruptly. With this operation, the main body 11 is moved in the rightdirection. The moving body 10 can be moved in the right direction on theslide surface by repeating the above operation.

[0077] The moving body 10 can be moved in an opposite direction byreplacing the operation of the piezoelectric element 13 with that of thepiezoelectric element 13′.

[0078] In the first and second embodiments of the present invention, thepermanent magnet and the coil(s) are disposed along the guide in one rowwith respect to the moving body. However, it is possible to dispose aplurality of rows of permanent magnets and coils by disposing them alongthe guide where they were not disposed in the first and secondembodiments or by disposing them on upper and lower portions of thesheet surface.

[0079] Further, the pressure force applied to the main body when it isimpact driven is obtained from the magnetic force generated by thecoil(s) or the magnetic body provided with the moving body. However, adifferent pressure application means may be provided and used.

EXAMPLE

[0080] Next, an example of the present invention will be described belowin detail with reference to FIGS. 13 and 14(a) and 14(b).

[0081]FIG. 13 is a perspective view showing the example of the presentinvention. In the example of the present invention, any of the actuatorsshown in the embodiments is applied to a mechanical type optical switch.As shown in FIG. 13, in a mechanical type optical switch 20 of thepresent invention, optical fibers 21 are inserted into sliders 22 andfixed therein so that they can linearly move integrally with the sliders22. A standard optical fiber having a diameter of 125 μm is used as eachoptical fiber 21. The sliders 22 slide along slide guides 24 formed on aboard 23 having a thickness of 10 mm. Each 100 pieces of the slideguides 24 are formed on the front and back surfaces of the board 23 soas to be orthogonal to each other. The number of the slide guides 24 isdetermined by the scale of optical switches, and 100×100 sets of opticalswitches are provided in this example. A permanent magnet is disposedsuch that S-poles and N-poles thereof are alternately arranged along theslide guide 24.

[0082] Next, the sliders 22 will be described in detail with referenceto FIG. 14(a) and FIG. 14(b). FIG. 14(a) is a partial enlarged view ofthe mechanical type optical switch of FIG. 13 (in FIG. 14(a), a part ofthe board is omitted so that the figure can be understood easily), andFIG. 14(b) is a sectional view of the slider 22. The slider 22 iscomposed of a slider main body 31 into which an optical fiber 21 isinserted, piezoelectric elements 32 and 32′ secured to the slider mainbody 31, and coils 33 and 33′ secured to the piezoelectric elements 32and 32′. The slider 22 is arranged as a micro actuator that is impactdriven. The slider main body 31 has a size of 5 mm that is approximatelyhalf the thickness of the board 23 in the height direction thereof inwhich the optical fiber is inserted. Further, the slider main body 31has a length of 4 mm and a width of 2 mm. Stainless steel is used as amaterial of the slider main body 31. The end surface of the opticalfiber 21 is flush with the bottom surface of the slider main body 31 oris slightly retracted therefrom (preferably 25 μm or less to suppress aninsertion loss to a low level). The cladding thickness of the opticalfiber 21 at the portion thereof inserted into the slider main body 31may be set larger than that of the other portion thereof.

[0083] Each coil has a size half that of the slider main body 31 and isformed in an approximately rectangular prism of 3 mm×3.3 mm×1.8 mm.Further, a copper wire is used as a winding material of each coil. Acoil wiring 331 is taken out to the outside so as to travel along anoptical fiber 21. A PZT laminated type piezoelectric element having alength of 5 mm and a cross section of 2 mm×1 mm is used as eachpiezoelectric element. A magnetic sensor 34 is attached to the slidermain body 31 so as to detect the position of the micro actuator.

[0084] As shown in FIG. 14(b), a through hole is formed through theslider main body 31, and the optical fiber 21 is inserted therethrough,and bonded and secured therein. The coil 33 is bonded and secured to theslider main body 31 through the piezoelectric element 32. The coil 33and the piezoelectric element 32 are arranged independently of a slideguide 24 so that they are not in contact therewith. A voltage must beapplied to the piezoelectric element 32 in order to impact drive theslider 22, and a piezoelectric element wiring 321 for this purpose istaken out to the outside so as to travel along the optical fiber 21.

[0085] The position of the micro actuator is detected by the magneticsensor 34 attached to the slider main body 31. The magnetic sensor 34 isattached to the slider main body 31 such that the head portion thereofextends off the slider main body 31. A magnetized pattern 35 is providedon the board 23 so as to face the magnetic sensor 34 attached to theslider main body 31. A magnetic sensor wiring 341 from the magneticsensor 34 is also taken out to the outside so as to travel along theoptical fiber 21.

[0086] As to the arrangement of the example, finally, the size of themechanical type optical switch in its entirety will be described. Thenumber of the guides along which the sliders travel are set to 100pieces, and the guides are disposed at pitches of 4 mm (in FIG. 1, theintervals between the guides are increased and the number of the guidesis omitted for easy understanding). The boards 13 is formed in a shapehaving a size of 408 mm×408 mm×10 mm thick.

[0087] (Operation of the Example)

[0088] Next, an operation of the mechanical type optical switch of theexample of the present invention will be described. In the mechanicaltype optical switch 20 shown in FIG. 13, the optical fibers drawn ontothe front and back surfaces of the board 23 are moved to a positionwhere the fiber cores thereof are aligned with each other, thereby theyare switched and connected to each other. FIG. 15 is a plan view showingthe schematic state of the above operation (in the figure, a step formedin each slide guide 24 is omitted to simplify the figure). In FIG. 15,sliders 22 and 22 a on the front and back surfaces of the board 23 aremoved in a white arrow direction and a black arrow direction,respectively, and the connection of optical fibers to each other iscompleted by aligning the cores thereof within a through hole 26 formedthrough the boards 23. FIG. 16 is a sectional view showing the sliders22 and 22 a when the cores of the optical fibers are aligned with eachother. The slider main body 31 of the slider 22 on the front surface ofthe board 23 reciprocates in a right and left direction on the sheetsurface with the slide surface 311 thereof in contact with the guidesurface of the board 23. In contrast, the slider main body 31 a of thesliders 22 a on the back surface of the board 23 reciprocates in avertical direction on the sheet surface with the slide surface 311 athereof in contact with the guide surface of the board 23. The guidesurface with which the slide surface 311 comes into contact is a guidesurface 36 shown in FIG. 14(a). In this state, the optical fiber 21drawn onto the front surface side is aligned with the optical fiber 21 adrawn from the back surface side so that they are connected to eachother.

[0089] Subsequently, the operation of the mechanical type optical switchwill be described in more detail. First, in the mechanical type opticalswitch 20 shown in FIG. 15, when a command for joining the optical fiberof the slider 22 to the optical fiber of the slider 22 a is supplied toa control system (not shown) first, coils 33 and 33′ are energized todrive the sliders to which the optical fibers to be switched areattached. At this time, the respective sliders perform anelectromagnetic type linear motor operation while the polarities of theenergized coils are switched, as shown in FIG. 3. At this time, thesliders 20 and 22 a move long distances at high velocity along the slideguides 24 on the boards 23. They complete the movement in about 20 ms ata maximum. As shown in FIG. 15, when the sliders 22 are roughly moved tothe column of the slider 22 a and the slider 22 a are roughly moved tothe row of the sliders 22 by the linear motor operation, the sliders 22is aligned with the slider 22 a by the impact drive micro actuatorsformed in the sliders 22 a in an order of submicron. This impact driveis carried out in such a manner that an attractive force is generatedbetween the coils 33 and 33′ and a permanent magnets, respectively, bysupplying a current to the coils 33 and 33′ and the pressure force ofthe slider main body 31 against the guide surfaces of the board isobtained thereby. However, since the operation principle of the impactdrive operation of the sliders of the example is as described above withreference to FIG. 4, the detailed description thereof is omitted.

[0090] The operation performance of the impact drive in this examplewill be described with reference to FIG. 17. Note that only one set of acoil and a piezoelectric element is used in FIG. 17 and the coil isarranged as a simple inertial body for the purpose of simplification.First, a calculation method will be briefly described. In this example,a PZT piezoelectric element is used as the piezoelectric elements. Whenthe PZT piezoelectric element extends by a voltage applied thereto, aslider moves in an amount of movement (ΔX1). The slider, the PZTpiezoelectric element and the inertial body slide and move as a singlerigid body in an amount of movement (X). Then, the total of the amountof movement (ΔX1) and the amount of movement (X) is defined as a totalamount of movement per 1 pulse. A time passed in the operation of theone pulse is defined as one cycle (T), and a feed velocity is defined asa product of the total amount of movement and (1/T).

[0091] Next, equations will be shown in detail. Kinetic equations when avoltage is applied to the PZT piezoelectric element and it generates anextension force (P) are established as to the slider (mass: M1), theinertial body (mass: M2), and the piezoelectric element (mass: Mp).

[0092] When the coefficient of static friction of the slider at thistime is represented by μ0, a frictional force (μ0F) is generated in theslider by a pressure force F as shown in the following equations (1) and(2).

P−μ0·F=α1·(M1+0.5 Mp)  (1)

P=α2·(M2+0.5 Mp)  (2)

[0093] The accelerations (α1 and α2) of the slider and the inertial bodyare determined from the equations (1) and (2), respectively. The amountof extension (ΔX) of the piezoelectric element is the total of themoving amount (ΔX1) of the slider and the moving amount (ΔX2) of theinertial body. Thus, the following equation (3) is obtained.

ΔX=ΔX1+ΔX2  (3)

[0094] Further, the moving amounts of the slider and the inertial bodyare determined by the following equations (4).

ΔX1=0.5*(0.5*α1)*Δt{circumflex over ( )}2

ΔX2=0.5*(0.5*α2)*Δt{circumflex over ( )}2  (4)

[0095] Accordingly, the moving amount (ΔX1) of the slider can becalculated using the equations (1) to (4). It is contemplated here thatthe accelerations α continuously changes during the time Δt. In thiscalculation, the accelerations are multiplied by 0.5 and linearlyapproximated.

[0096] Next, the moving amount of the overall system when it slides as arigid body is determined. First, the initial velocities of therespective mass systems are determined by the following equations (5).

V01=(0.5·α1)·Δt

V02=(0.5·α2)·Δt  (5)

[0097] Accordingly, the momenta of the respective mass systems aredetermined by the following equations (6).

MV1=V01·(M1+0.5·Mp)

MV2=V02·(M2+0.5Mp)  (6)

[0098] An entire momentum is represented by the following equation fromthe law of conservation of momentum, thereby the initial velocity (V0)when an overall system begins to move (V0) is determined by thefollowing equation (7).

(M1+M2+Mp)·V0=MV1−MV2  (7)

[0099] The kinetic energy (E) at that time is determined by thefollowing equation (8) using the initial velocity determined by theequation (7).

E=0.5·(M1+M2+Mp)·V0{circumflex over ( )}2  (8)

[0100] The sliding amount (X) of the overall system is determined by thefollowing equation (9) assuming that the above energy has been entirelyconsumed as a friction loss.

X=E/μF  (9)

[0101] where, μ shows a coefficient of dynamic friction.

[0102] The acceleration (a) when the overall system slides isrepresented by the by the following equation (10).

(M1+M2+Mp)·a=μF  (10)

[0103] Thus, the period of time (ts) passed from the time the overallsystem begins to move to the time it stops is represented by thefollowing equation (11).

ts=V0/a  (11)

[0104] Further, a period of time necessary to the feed of one pulse,that is, the cycle (T) is the total of the time (Δt) necessary to theexpansion of the PZT piezoelectric element, the time (ts) during whichthe overall system slides as the rigid body, and further the time (tb)necessary for the contraction of the PZT piezoelectric element, as shownin by the following equation (12). The time (tb) necessary for thecontraction of the PZT piezoelectric element is determined based on theassumption that the inertial force generated at that time issufficiently small with respect to the frictional force (μ0F).

T=Δt+ts+tb  (12)

[0105] A feed velocity (Vs) is determined from a total moving amount andthe cycle (T), as shown in the following equation (13).

Vs=(ΔX1+X)/T  (13)

[0106] When the data of the specification of the actual piezoelectricelements, the mass of the sliders, and the like are input to the aboveequations, the moving amount per one path of the overall system and themoving velocity thereof are determined as shown below.

[0107] Moving amount per one pulse (resolution): 1 nm

[0108] Moving velocity: 10 μs/sec

[0109] The positions reached by both the rough movement carried out bythe linear motor and the micro movement carried out by the impact driveare detected by the magnetic sensor 34 mounted on the slider main body31. Since the magnetized pattern 35 is formed on the board 23 asdescribed above, the position of the slider 22 itself can be determinedby reading the magnetized pattern 35.

[0110] Note that it is required to align the optical axes of opticalfibers at an accuracy of submicron. Therefore, the optical axes can bealigned with each other at a pinpoint accuracy by recording a magnetizedpattern that corresponds to an optimum slider position as an addresswhen the optical axes are adjusted. Further, it is also possible toalign the optical axes periodically when optical fibers are not used andto update the optimum address, in addition to that they are subjected toalignment when an apparatus is shipped.

[0111] As described above in detail, since the actuator of the presentinvention includes a high velocity self-moving means and a self-movingmeans of micro pitch, there can be realized a common actuator that canmove a large distance at high velocity as well as move at a pinpointaccuracy. According to the present invention, an actuator having theabove characteristics can be realized compactly. Further, when anoptical switch is arranged using the actuators according to the presentinvention, a mechanical type optical switch capable of performing highvelocity switching with a less amount of optical loss can be realizedcompactly.

1. An actuator for moving a movable body by using a thrust forceobtained by converting electric energy into kinetic energy, comprising:a first means for moving said movable body at high velocity for roughpositioning of said movable body; and a second means for moving saidmovable body at low velocity for accurate positioning of said movablebody.
 2. The actuator according to claim 1, wherein said first meansbeing a moving section of a linear motor having a moving section and astationary section.
 3. The actuator according to claim 2, wherein saidmoving section of said linear motor comprising any of a coil, apermanent magnet, and a conductive body, and said stationary section ofsaid linear motor comprising any of a permanent magnet and a coil. 4.The actuator according to claim 1, wherein said second means comprisinga piezoelectric element.
 5. The actuator according to claim 1, whereinsaid second means is controlled by impact drive or inchworm drive usinga piezoelectric element.
 6. An actuator for controlling positioning of amovable body, comprising: a main body of said movable body; a pair ofpiezoelectric elements secured to said main body; a pair of coilssecured to said pair of piezoelectric elements; a guide for guiding saidmain body; and a plurality of magnets disposed along said guide.
 7. Theactuator according to claim 6, wherein said actuator is controlled byimpact drive or inchworm drive using said electric elements.
 8. Theactuator according to claim 6, wherein said main body having a positiondetecting means for detecting a position thereof.
 9. An actuator forcontrolling positioning of a movable body, comprising: a main body ofsaid movable body; a piezoelectric element secured to said main body; acoil secured to said piezoelectric element; a guide for guiding saidmain body; and a plurality of magnets disposed along said guide. 10-16.(Canceled)